2 nm Cesium (Cs+) FIB

Demo FIB

zeroK completed construction of a Cs+ Low Temperature Ion Source (LoTIS) demo FIB in the fall of 2016. This instrument is now online and proves LoTIS technology works. For the full details, see our publication. The latest news about this instrument can be found on the news page.

The LoTIS was retrofit onto a gallium LMIS-based FIB platform. The upgraded system can deliver 2 nm spot-sizes at a beam energy of 10 kV. Prior to the upgrade the system only was able to provide 5 nm spots at 40 kV. Beam currents over 3 nA can also be provided for larger volume milling operations.

The system also offers a full range of gas chemistries including bromine, xenon difluoride, oxygen and TMCTS for etch enhancement. Tungsten is available for deposition.

Features
  • 2 nm Imaging Resolution
  • Beam energies up to 10 keV
  • Currents up to 3 nA
  • Gas chemistries for etch or deposition
  • Patterning engine of the base Vectra FIB platform
Publications
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Unique Lithium (Li+) FIB

Lithium FIB

This was the first FIB system built featuring zeroK's ion source technology. Constructed at NIST this system has in the intervening years served a a unique platform for investigations of lithium implantation and diffusion.

Features
  • In Service 8+ years at NIST
  • Retrofit FEI FIB-200
  • 30 nm Imaging Resolution
  • 100 pA Beam Current
  • World-Unique FIB
Publications
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Low-Temperature Ion Source (LoTIS)

Colder Atoms

Employing Nobel-prize winning techniques from the field of laser cooling, the LoTIS first creates a cold beam of atoms, just a few millionths of a degree above absolute zero! This beam of atoms is then photoionized in an electric field to create an extremely cold ion beam. By removing the heat, and thereby the randomness, from its ions, FIBs employing a LoTIS will be able to more sharply focus their ion beams.

Brighter Ions

In slightly more technical terms, the LoTIS will have a higher brightness brighter and smaller energy spread than the industry standard technology, the liquid metal ion source (LMIS). Higher brightness enables more current in a smaller focused spot, while reduced energy spread mitigates chromatic aberrations. The result is a source of ions for FIB applications that provides high-precision operation over a wide range of beam energies. zeroK has developed a LoTIS that produces cesium ions which would allow for an integrated elemental mapping tool (using Secondary Ion Mass Spectrometry) in combination with nanomachining capabilities. Updates in the development of LoTIS technology can be followed on the News page.

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